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Symposium VI: Metrology, Reliability and Testing

Symposium VI: Metrology, Reliability and Testing

Virtual Conference Registration
  • Conference Agenda
  • CSTIC 2023 Call for Papers

Opening Remarks

  • Peilin Song

    IBM T.J. Watson Research Center

    View
  • Oral Session

  • Poster Session

  • Optical Overlay Metrology Trends in Advanced Nodes

    Megged Efi

    KLA

    Study on Weighted Binary Classifier with Imbalanced SEM defect Data

    Hairong Lei

    ASML-HMI

    Advanced Modeling Techniques Expand Applications of Picosecond Laser Acoustics for RF Process Monitoring

    Johnny Dai

    Onto Innovation

    All side optical chipping and crack inspection of dice in a die attach machine at high throughput

    Norbert Ackerl

    Besi Switzerland AG

    Machine Learning Enhanced Optical Metrology

    Dror Shafir

    Nova LTD

    Advanced Applications of Picosecond Ultrasonic Technology in Semiconductor Manufacturing

    Cheolkyu Kim

    Onto Innovation

    Review of micro- and nanoprobe metrology for direct electrical measurements on-product wafers

    Benny Guralnik

    KLA

    Advanced metrology techniques for MRAM production monitoring

    Alberto Cagliani

    KLA

    Faster Fault Isolation with Advanced Data Analysis and Computer Vision

    Franco Stellari

    IBM Research

    High inheritability and flexibility SmartTest8 TestMethod library on ultra-high-speed SerDes measurement

    Jiaying Xiang

    Advantest

    Best practices of extreme using 93K FVI16 and AVI64 to test automotive power system basis chip

    KAI KANG

    Advantest

    An Industry Example to Reduce the Test Time by Optimizing Data Extraction Method

    Xiaofeng Liang

    NXP semiconductor (China) Ltd.

    ATE solution for high-resolution convertor

    Qin Feng

    Advantest

    The flexible and inheritable SMT7 solution for High-Speed DDR PHY IP with IJTAG

    Yichen Xiao

    Advantest

    TOWARDS LEAN FRONT END IC MANUFACTURING (with AMHS implants)

    George W. Horn

    Middlesex Industries Sa

    Recent advances in statistical modelling methodology development for ReRAM applications

    Ernest Wu

    IBM Research

    Study on Stress Migration of FCQFN Package with unbalanced arrangement of bumps

    Shuanshe Chao

    ZTE

    Machine Learning Based Aging Critical Path Selection

    Jiadong Yao

    Sanechips Technology Co., Ltd.

    Research on Reliability Optimization Mechanism of 28HKMG Technology

    Weiwei Ma

    Shanghai Huali Integrated Circuit Corporation (HLIC)

  • I3C Protocol Testing of Sensor Interface on the Advantest V93000 Tester

    Kaitao Liu

    Advantest

    Effective usage of Attenuators on Production Test

    Hao Chen

    Advantest

    MCU+ Test Solution on V93000 SmartTest8

    Tianyu Zhang

    Advantest

    Conditionally executed tests, branching and algorithmic binning - Getting it right

    Lai-Choon Chan

    Teradyne Inc

    Study of Negative Charge Accumulation Mechanism and Removal Method on the Wafer Surface in Via Photo Development Process

    Haihua Chen

    Shanghai IC R&D Center

    14 Bits current DAC testing with 16 Bits instruments

    Luffy Jin

    Teradyne

    A Neural Network Approach to Analyze FDC Data in Semiconductor Manufacture

    Wei Yu

    HLMC

    A Voltage Screen Model and Method for Early Failure Screening

    Wen Ying

    Semiconductor Manufacturing International Corporation(SMIC)

    Study and Improvement on measurement accuracy of Image Based Overlay

    Zhi-Feng Gan

    Semiconductor Manufacturing International Corporation(SMIC)

    Tiny SADP Defect Detection and Reduction for 19nm Nand Flash Technology Semiconductor Manufacturing Engineering

    QiuFeng Cao

    HLMC

    Different Module's Process Affect to Poly Pattern Etch Stick Particle

    Jiayi Fu

    HLMC

    Classification of Wafer Backside Images via FasterRcnn-Based Neural Network

    Junjun Zhuang

    HLMC

    WAT Throughput Improved by Algorithm Optimization

    Tong Chen

    HLMC

    Anomaly Detection of Semiconductor Processing Data based on DTW and LOF Algorithm

    Yong Wang

    HLMC

    Reason Forecast with BERT on Test Result Alarm in Semiconductor Fab

    Meng Xue

    HLMC

    The study of method to improve defect scan sensitivity post dummy poly remove in 14nm node

    Xingdi Zhang

    HLMC

    The type and solution of inline poly residue defect for 28 HK process improvement

    Min Wang

    HLMC

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